![]() ![]() ![]() ![]() The low thermal conductivity (~0.1W/m.K), chemical resistance, and ease of deposition/patterning of Parylene-N make it an excellent choice of material for use in MEMS thermal detectors. The detector features a P-doped polysilicon/Nichrome (Cr20-Ni80) thermocouple, which is embedded into a thin layer of Parylene-N to provide structural support. Presented is a novel design for an uncooled surface-micromachined thermoelectric (TE) infrared (IR) detector. Parylene supported 20 um*20 um uncooled thermoelectric infrared detector with high fill factor
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